The scope of this application note is about the PRF-1150 1kW, 13.56 MHz, Class E RF generator evaluation module. The application note introduces the evaluation module, its theory of operation, ...
Advanced Industries’ eVerest RF power generator offers multilevel power pulsing and high-speed response for sub-2 nm semiconductor nodes. Integrated into any existing plasma power delivery system, ...
San Francisco, CA. Reno Sub-Systems, a producer of high-performance RF matching networks, RF power generators, and gas-flow management systems for semiconductor manufacturing, today announced at ...
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